Flow passage structure, intake and exhaust member, and processing apparatus

An intake and exhaust member comprising:

• a member that is connectable to a feeder capable of at least one of delivery and suction of fluid and is provided with:
• a plurality of first openings;
• a plurality of second openings;
• a flow passage connecting the plurality of first openings with the plurality of second openings;
• and
• a plurality of joining and branching parts provided in the flow passage, the plurality of joining and branching parts each including a plurality of first parts and a plurality of second parts, the plurality of first parts having respective first coupling ends connected with each other and respective first outer ends opposite to the first coupling ends, the plurality of second parts having respective second coupling ends connected with each other and respective second outer ends opposite to the second coupling ends, the plurality of second parts being closer to the plurality of second openings than the plurality of first parts are to the plurality of second openings in each of paths between the plurality of first openings and each of the plurality of second openings in the flow passage, the first coupling ends being connected with the second coupling ends in each of the plurality of joining and branching parts, wherein
• two or more of the plurality of joining and branching parts are provided in each of the paths between the plurality of first openings and each of the plurality of second openings in the flow passage, and
• each of the first outer ends of the plurality of first parts of one of the plurality of joining and branching parts is connected with one of the second outer ends of another one of the plurality of joining and branching parts.

A processing apparatus comprising:

• a support that supports an object;
• a member provided with:
• a plurality of first openings,
• a plurality of second openings facing the support,
• a flow passage connecting the plurality of first openings with the plurality of second openings, and
• a plurality of joining and branching parts provided in the flow passage, the plurality of joining and branching parts each including a plurality of first parts and a plurality of second parts, the plurality of first parts having respective first coupling ends connected with each other and respective first outer ends opposite to the first coupling ends, the plurality of second parts having respective second coupling ends connected with each other and respective second outer ends opposite to the second coupling ends, the plurality of second parts being closer to the plurality of second openings than the plurality of first parts are to the plurality of second openings in each of paths between the plurality of first openings and each of the plurality of second openings in the flow passage, the first coupling ends being connected with the second coupling ends in each of the plurality of joining and branching parts;
• and
• a feeder connected to the member, the feeder being capable of at least one of:
• introduction of fluid to the plurality of first openings;
• and suction of fluid from the plurality of first openings, wherein
• two or more of the plurality of joining and branching parts are provided in each of the paths between the plurality of first openings and each of the plurality of second openings in the flow passage, and
• each of the first outer ends of the plurality of first parts of one of the plurality of joining and branching parts is connected with one of the second outer ends of another one of the plurality of joining and branching parts.