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AssigneeTRUMPF Huettinger GmbH + Co. KG
InventorsAndre Grede, Daniel Krausse, Anton Labanc, Christan Thome, Alberto Pena Vidal
Estimating the term…
A power supply system includes a digital-to-analogue converter (DAC) configured to generate an analogue signal and an amplifier path on which the analogue signal is amplified to generate a high-frequency power signal to be provided to a plasma chamber for supplying a plasma process with high-frequency power. The DAC is configured to be connected to an arc detection device that is configured to monitor the plasma chamber for arcs and be controlled by the arc detection device to modify the analogue signal in response to detecting an occurrence of an arc.
A power supply system comprising:
The power supply system of 19, wherein the controller is configured to, in response to detecting the occurrence of an arc, control a voltage of the reference signal in one of a stepped way and a ramped way, such that a voltage of the analogue signal is decreased and a plasma operation power for the plasma operation is reduced to an arc extinguishing power in the one of the stepped way and the ramped way.
Dependencies are inferred from the claim text.