Composite charged particle beam apparatus
AssigneeHitachi High-Tech Science Corporation
InventorsHiroyuki Suzuki, Shinya Kitayama
Life of this patent
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Abstract
A composite charged particle beam apparatus includes a first charged particle beam column that irradiates a thin sample with a first charged particle beam, a second charged particle beam column that irradiates an irradiation position of the first charged particle beam of the thin sample with a second charged particle beam, a sample holder that fixes the thin sample, and a sample stage on which the sample holder is mounted. The sample holder is able to rotate the thin sample within a surface parallel to an observation surface of the thin sample around a first rotational axis on the sample stage.
Claims16
A composite charged particle beam apparatus comprising:
- a first charged particle beam column configured to irradiate a thin sample with a first charged particle beam;
- a second charged particle beam column configured to irradiate an irradiation position of the first charged particle beam of the thin sample with a second charged particle beam;
- a sample holder configured to hold the thin sample;
- and a sample stage on which the sample holder is mounted,
- wherein the sample holder is configured to oscillate the thin sample on the sample stage along a circular locus having a first rotational axis and within a surface which is parallel to an observation surface of the thin sample, and through which an irradiation axis of the first charged particle beam column passes.
A composite charged particle beam apparatus comprising:
- a first charged particle beam column configured to irradiate a thin sample with a first charged particle beam;
- a second charged particle beam column configured to irradiate an irradiation position of the first charged particle beam of the thin sample with a second charged particle beam;
- a third charged particle beam column, which is tilted with respect to an irradiation axis of the first charged particle beam column, and which is configured to irradiate an irradiation position of the first charged particle beam on the thin sample with a third charged particle beam;
- a sample holder configured to hold the thin sample;
- and
- a sample stage on which the sample holder is mounted,
- wherein the sample holder is configured to oscillate the thin sample on the sample stage along a circular locus having a first rotational axis and within a surface which is parallel to an observation surface of the thin sample, and through which an irradiation axis of the third charged particle beam column passes.
Dependencies are inferred from the claim text.