Transparent conducting films including complex oxides
AssigneeThe Penn State Research Foundation
InventorsRoman Engel-Herbert, Lei Zhang
Life of this patent
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Abstract
Transparent conducting films including an alkaline earth, transition metal oxide and their optimization of electrical conductivity and optical transparency by aliovalent substitution, which are useful as electrodes for semiconductors and other electronic devices are disclosed. Such materials include thin films of an aliovalent substituted transition metal oxides of Formula (I): A1-xA′xB1-yB′yO3-d (I) or a transition metal oxide of Formula (II): (ABO3-d)m(A′B′O3-d′)n.
Claims16
A transparent conducting film having a transmittance of about 80% or more at a wavelength of 550 nm comprising a transition metal oxide of formula:
- A1-xA′xB1-yB′yO3-d (I)
- wherein A and A′ are different from each other and A represents one or more divalent alkaline earth cations;
- A′ represents either one or more trivalent cations or one or more monovalent cations;
- B and B′ are different from each other and B represents a transition metal selected from group VB;
- d is a value between −0.5≤d≤0.5;
- and the values for x and y are 0≤x≤1, 0≤y≤1;
- and
- wherein B′ is present and represents one or more group VIB transition metal elements to adjust a Fermi level position in a conduction band of the transition metal oxide.
A transparent conducting film comprising a transition metal oxide of formula:
- (ABO3-d)m(A′B′O3-d′)n (II)
- wherein A and A′ are different from each other and A represents one or more divalent alkaline earth cations;
- A′ represents either one or more trivalent cations or one or more monovalent cations;
- B and B′ are different from each other and B represents a transition metal selected from group VB;
- and B′ represents a transition metal from the groups VB, IVB, VIB, IVA and/or group IIIA;
- d and d′ have values of −0.5≤d≤0.5 and −0.5≤d′≤0.5, respectively, and 1≤m≤10 and 1≤n≤10;
- and
- wherein the film has a transmittance of about 80% or more at a wavelength of 550 nm and a conductivity of about 2000 S/cm (resistivity 5×10−4 Ω×cm) to about 100,000 S/cm (resistivity 1×10−6 Ω×cm) at room temperature.
Dependencies are inferred from the claim text.