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US 10,311,898 B1Granted
Near field transducers (NFT) including oxide layer
AssigneeSeagate Technology LLC
InventorsMark Anthony Gubbins, Peter Kevin McGeehin, Marcus Benedict Mooney, Michael James Hardy
Life of this patent
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Abstract
Devices that include a near field transducer (NFT) the NFT includes a bulk of at least one plasmonic material and at least one sacrificial metal; and a surface layer that includes an oxide of the at least one sacrificial metal.
Claims7
A method comprising:
- depositing a mixed material, the mixed material comprising at least one plasmonic material selected from:
- silver (Ag), copper (Cu), or combinations thereof and at least one sacrificial metal selected from:
- aluminum (Al), titanium (Ti), tantalum (Ta), tungsten (W), or combinations thereof;
- and
- oxidizing at least a portion of the at least one sacrificial metal to form a surface layer comprising an oxide of the sacrificial metal on the mixed material.
2 more elements
Dependencies are inferred from the claim text.