Apparatus and method of determining a bonding position of a die
AssigneeAsm Technology Singapore Pte Ltd
InventorsKui Kam Lam, Shun Ming Fung, Chi Keung Leung, Wing Kin Lam, Yuet Cheung
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AssigneeAsm Technology Singapore Pte Ltd
InventorsKui Kam Lam, Shun Ming Fung, Chi Keung Leung, Wing Kin Lam, Yuet Cheung
Estimating the term…
The invention provides an apparatus for determining a bonding position of a die. The apparatus includes a bond head for picking up and bonding the die. The apparatus further includes a plurality of cameras positioned and configured for capturing at least a first image including a first side surface of the die, a second image including a second side surface of the die and a third image including the first and second side surfaces of the die. Further, the invention provides a method of determining a bonding position of a die. The method captures at least a first image including a first side surface of the die, a second image including a second side surface of the die and a third image including the first and second side surfaces of the die. The method further determines a bonding position of the die based on the captured images.
Apparatus for determining a bonding position of a die, the apparatus comprising:
A method of determining a bonding position of a die, the method comprising:
Dependencies are inferred from the claim text.