Incremental multi-patterning validation
AssigneeSynopsys, Inc.
InventorsYuli Xue, Weiping Fang, John Robert Studders, Byungwook Kim
Life of this patent
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AssigneeSynopsys, Inc.
InventorsYuli Xue, Weiping Fang, John Robert Studders, Byungwook Kim
Estimating the term…
A computer-implemented method for validating a design characterized by a multi-patterning layer is presented. The method includes receiving the multi-patterning layer in a memory of the computer when the computer is invoked to validate the design. The method further includes correcting, using the computer, a first error in a first shape of the multi-patterning layer in accordance with a first rule thereby forming a corrected layer. The method further includes incrementally validating, using the computer, a first portion of the corrected layer in accordance with the first error and a first connected component of a first graph associated with the multi-patterning layer.
A computer-implemented method for validating a design characterized by a multi-patterning layer, the method comprising:
A computer system operative to:
A non-transitory computer-readable storage medium comprising instructions, which when executed by a computer, cause the computer to:
Dependencies are inferred from the claim text.