Optical system for producing lithographic structures
AssigneeCarl Zeiss AG
InventorsPhilipp Huebner, Gerhard Krampert, Stefan Richter, Timo Mappes
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Abstract
An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
Claims20
A method of operating an optical system configured to produce lithographic structures, the optical unit comprising a projection optical unit, a preview optical unit and a substrate holder, the method comprising:
- recording a test object using the preview optical unit or the projection optical unit in an initial field;
- positioning the test object in the initial field so that the test object has a defined position in the initial field;
- carrying out, via the substrate holder, a coarse displacement of the test object between the initial field and a target field;
- registering coarse relative coordinates of the coarse displacement;
- recording the test object using the other of the two optical units from the optical group;
- finely positioning the test object in the target field so that the test object has a defined position in the target field;
- and
- registering changes in the coarse relative coordinates during the fine positioning and producing the relative coordinates from the coarse relative coordinates and the result of the registration.
A system comprising:
- one or more processing devices;
- and
- one or more machine-readable hardware storage devices comprising instructions that are executable by the one or more processing devices to perform operations comprising:
- recording a test object using a preview optical unit or a projection optical unit in an initial field, the preview optical unit and the projection optical unit being optical units of an optical system configured to produce lithographic structures;
- positioning the test object in the initial field so that the test object has a defined position in the initial field;
- carrying out, via a substrate holder of the optical system, a coarse displacement of the test object between the initial field and a target field;
- registering coarse relative coordinates of the coarse displacement;
- recording the test object using the other of the two optical units from the optical group;
- finely positioning the test object in the target field so that the test object has a defined position in the target field;
- and
- registering changes in the coarse relative coordinates during the fine positioning and producing the relative coordinates from the coarse relative coordinates and the result of the registration.
One or more non-transitory machine-readable hardware storage devices comprising instructions that are executable by one or more processing devices to perform operations comprising:
- recording a test object using a preview optical unit or a projection optical unit in an initial field, the preview optical unit and the projection optical unit being optical units of an optical system configured to produce lithographic structures;
- positioning the test object in the initial field so that the test object has a defined position in the initial field;
- carrying out, via a substrate holder of the optical system, a coarse displacement of the test object between the initial field and a target field;
- registering coarse relative coordinates of the coarse displacement;
- recording the test object using the other of the two optical units from the optical group;
- finely positioning the test object in the target field so that the test object has a defined position in the target field;
- and
- registering changes in the coarse relative coordinates during the fine positioning and producing the relative coordinates from the coarse relative coordinates and the result of the registration.
Dependencies are inferred from the claim text.