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US 10,310,376 B2Granted
Resist composition, pattern forming process, polymer, and monomer
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTeppei Adachi, Ryosuke Taniguchi, Koji Hasegawa, Kenji Yamada
Life of this patent
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Abstract
A polymer comprising recurring units containing a specific lactone ring and having an alkyl group on γ-butyrolactone skeleton of fused ring lactone and an alkyl ester substituent group intervening between the lactone structure and the polymer backbone is provided. A resist composition comprising the polymer as base resin is improved in such properties as DOF margin and MEF and quite effective for precise micropatterning.
Claims13
A polymer comprising recurring units having the formula (1):
- wherein R1 is hydrogen or methyl,
- R2 is a C1-C20 straight, branched or cyclic divalent hydrocarbon group in which any constituent —CH2— moiety may be replaced by —O— or —C(═O)—,
- R3 and R4 are each independently a C1-C15 straight, branched or cyclic alkyl group, R3 and R4 may bond together to form a ring with the carbon atom to which they are attached, a ring-forming combination of R3 and R4 is a C2-C15 straight, branched or cyclic alkylene group,
- W is —CH2—, —CH2CH2— or —O—, or two separate —H,
- the broken line designates a single bond or divalent organic group bonding the norbornane, bicyclo[2.2.2]octane, 7-oxanorbornane or cyclohexane ring structure to the γ-butyrolactone ring structure, or a structure sharing one or two constituent carbon atoms between these ring structures.
2 more elements
Dependencies are inferred from the claim text.