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US 10,310,181 B2Granted
χ(2) modulators and related devices with barium titanate photonic crystal waveguides
AssigneeNorthwestern University
InventorsBruce W. Wessels, Zhifu Liu, Peter D. Girouard
Life of this patent
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Abstract
Barium titanate thin film waveguides and related modulator and devices with photonic crystal structures to promote wide bandwidths, low operating voltages and small footprint.
Claims13
A modulator device comprising a photonic crystal waveguide, said waveguide comprising a substrate;
- a nano-dimensioned film component coupled to said substrate, said film component comprising BaTiO3;
- and a single nanodimensioned ridge component coupled to said film component, said ridge component having a refractive index less than the refractive index of said film component, said film and ridge components comprising an electro-optic medium and an array of spaced lines of holes therein, said array defining an absent line of holes in the direction of light propogation through said medium and two tapered regions at opposite ends of said defined absent line, each said tapered region comprising lines of holes positionally shifted a constant nanometric distance from an adjacent line of holes, said array providing said waveguide a photonic crystal structure.
A modulator device comprising a photonic crystal waveguide, said waveguide comprising a substrate;
- a nano-dimensioned film component on said substrate, said film component comprising BaTiO3;
- a nanodimensioned Si3N4 ridge component on said film component;
- and two substantially coplanar electrodes, each said electrode on an opposite side of said ridge component, said film and ridge components comprising an electro-optic medium and an array of spaced lines of holes therein, said array defining an absent line of holes in the direction of light propogation through said medium and two tapered regions at opposite ends of said defined absent line, each said tapered region comprising lines of holes positionally shifted a constant nanometric distance from an adjacent line of holes, said array providing said waveguide a photonic crystal structure.
Dependencies are inferred from the claim text.