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US 10,310,155 B2Granted
Multiple-stack wire grid polarizer
AssigneeMoxtek, Inc.
InventorsR. Stewart Nielson, Shaun Ogden, Matt Free, Bin Wang, Hua Li, Brian Bowers
Life of this patent
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Abstract
A wire grid polarizer (WGP) can have improved performance due to a high aspect ratio (e.g. >3, >5, >10, >15, >20, or >30), where aspect ratio equals T/W, T is a sum of a thickness of wires of the first array 11 plus a thickness of wires of the second array 12 (i.e. T=Th11+Th12), and W is a maximum width of wires of the first array 11 and/or of the second array 12. Such high aspect ratio can be achieved with two arrays of wires 11 and 12, each capped by a thin film 01 and 02.
Claims20
A wire grid polarizer (WGP) comprising:
- a substrate having a first side, having a second side opposite of the first side, and being transparent;
- a first array of wires, defining a first array, located over the first side of the substrate with a proximal end closer to the substrate and a distal end farther from the substrate, the first array being parallel and elongated, with channels between adjacent wires, each wire of the first array comprising a first absorptive rib and a first reflective rib;
- a first thin film located at the distal end of the first array and being transparent;
- a second array of wires, defining a second array, located over the first thin film with a proximal end closer to the first thin film and a distal end farther from the first thin film, the second array being parallel and elongated, with channels between adjacent wires, each wire of the second array comprising a second absorptive rib and a second reflective rib;
- and
- a second thin film located at the distal end of the second array and being transparent.
3 more elements
A wire grid polarizer (WGP) comprising:
- a substrate having a first side, having a second side opposite of the first side, and being transparent;
- a first array of wires, defining a first array, located over the first side of the substrate with a proximal end closer to the substrate and a distal end farther from the substrate, the first array being parallel and elongated, with channels between adjacent wires;
- a first thin film located at the distal end of the first array and being transparent;
- a second array of wires, defining a second array, located over the first thin film with a proximal end closer to the first thin film and a distal end farther from the first thin film, the second array being parallel and elongated, with channels between adjacent wires;
- a second thin film located at the distal end of the second array and being transparent;
- each wire of the first array comprises a stack of ribs in the following order extending outward from the substrate towards the first thin film:
- a first transparent rib, a second transparent rib, and a first reflective rib;
- a material composition of the first transparent rib is different from a material composition of the second transparent rib;
- each wire of the second array comprises a stack of ribs in the following order extending outward from the first thin film towards the second thin film:
- a second reflective rib, a third transparent rib, and a fourth transparent rib;
- and
- a material composition of the fourth transparent rib is different from a material composition of the third transparent rib.
9 more elements
A wire grid polarizer (WGP) comprising:
- a substrate having a first side, having a second side opposite of the first side, and being transparent;
- a first array of wires, defining a first array, located over the first side of the substrate with a proximal end closer to the substrate and a distal end farther from the substrate, the first array being parallel and elongated, with channels between adjacent wires;
- a first thin film located at the distal end of the first array and being transparent;
- a first conformal coating over the first array, coating sides of wires of the first array, a distal end of wires of the first array between the first array and the first thin film;
- a second array of wires, defining a second array, located over the first thin film with a proximal end closer to the first thin film and a distal end farther from the first thin film, the second array being parallel and elongated, with channels between adjacent wires;
- a second thin film located at the distal end of the second array and being transparent;
- and
- a second conformal coating over the second array, coating sides of wires of the second array, a distal end of wires of the second array between the second array and the second thin film.
5 more elements
Dependencies are inferred from the claim text.