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US 10,310,144 B2Granted
Image sensor having photodetectors with reduced reflections
AssigneeIntel Corporation
InventorsKhaled Ahmed, Richmond Hicks
Life of this patent
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Abstract
An image sensor is described that has photodetectors with reduced reflections. In one example the image sensor has a plurality of photodetectors on a silicon substrate. The images sensor has a top surface and an anti-reflective coating over the photodetectors, the coating having an array of sub-wavelength sized features.
Claims20
An image sensor comprising:
- a plurality of photodetectors on a silicon substrate and having a top surface;
- an anti-reflective coating on the top surface over the photodetectors, the anti-reflective coating having an array of sub-wavelength sized features, wherein each of the sub-wavelength sized features comprises self-assembling block copolymer micro domains of a self-assembling block copolymer thin film that comprises alumina to provide a self-assembled alumina pattern over the photodetectors;
- and
- wherein the sub-wavelength sized features comprise cones extending from the top surface.
1 more element
A method comprising:
- forming an array of photodetector pixels on a silicon substrate;
- applying a thin film of a self-assembling block copolymer over the pixels;
- etching the thin film to form sub-wavelength features on the silicon as an anti-reflection coating over the silicon of the substrate, wherein each of the sub-wavelength sized features comprises self-assembling block copolymer micro domains of the self-assembling block copolymer thin film that comprises alumina to provide a self-assembled alumina pattern;
- and
- wherein the sub-wavelength features comprise an array of cones.
2 more elements
A system comprising:
- a communications chip to send images to external devices;
- a processor coupled to the communications chip to send images to the communications chip;
- and
- an image sensor coupled to the image processor to send captured image data to the image processor, the image sensor having a plurality of photodetectors on a silicon substrate and having a top surface, and an anti-reflective coating over the photodetectors, the anti-reflective coating having an array of sub-wavelength sized cones, wherein each of the sub-wavelength sized cones comprises nanocylinders of a self-assembling cylindrical phase block copolymer thin film that comprises alumina to provide a self-assembled alumina pattern.
1 more element
Dependencies are inferred from the claim text.