Probe apparatus and probe method

A probe apparatus comprising:

• a stage configured to hold a substrate and to be movable in horizontal and vertical directions;
• a first imaging device configured to capture an image of a probe needle configured to contact with an electrode of a device formed on a surface of the substrate;
• a first imaging optical unit including an optical system configured to perform image capture by using the first imaging device;
• a second imaging device configured to capture an image of the electrode in a state where the substrate is held on the stage;
• a second imaging optical unit including an optical system configured to perform image capture by using the second imaging device;
• a projection optical unit including an optical system configured to project an optical target mark onto each of image forming units of the first and the second imaging device at the same time, wherein the optical target mark is used for position alignment of the first and the second imaging device;
• and
• a target, wherein the optical target mark is a projected image of the target;
• wherein the projection optical unit is configured to form an image forming position, on which the optical target mark is projected, at an optically conjugate position with respect to the image forming unit of the first imaging device,
• wherein the target, the image forming position, and the image forming unit of the second imaging device are arranged to be optically conjugate with each other, and the optical target mark is projected on each of the image forming units of the first and the second imaging device at the same time, and
• wherein the image forming position of the optical target mark is located between the first imaging optical unit and the second imaging optical unit.