Probe guide plate and probe device

A probe device comprising:

• a probe guide plate comprising
• a first silicon substrate,
• a first recess portion formed in an upper surface of the first silicon substrate,
• first through-holes formed in the first silicon substrate at a bottom of the first recess portion,
• a first notch portion formed at an upper end portion of an inner wall of each of the first through-holes,
• a second silicon substrate directly bonded on the first silicon substrate without another material;
• a second recess portion formed to face the first recess portion in a lower surface of the second silicon substrate,
• second through-holes formed in the second silicon substrate at a bottom of the second recess portion and arranged to correspond to the first through-holes, and
• a second notch portion formed at a lower end portion of an inner wall of each of the second through-holes,
• wherein an upper end of each first notch portion is disposed at a boundary between a bottom of the first recess portion and a corresponding first through-hole, and a lower end of each second notch portion is disposed at a boundary between a top of the second recess portion and a corresponding second through-hole,
• wherein the first notch portion has a tapered shape and is inclined so that a height thereof gradually decreases as a distance in a width direction of the probe guide plate from the upper end of the first notch portion increases, the width direction being a direction that spans the first through-holes,
• wherein the second notch portion has a tapered shape and is inclined so that a height thereof gradually increases as the distance in the width direction of the probe guide plate from the lower end of the second notch portion increases;
• and
• probe terminals inserted into the first through-holes from the second through-holes of the probe guide plate.