Moisture detection and ingression monitoring systems and methods of manufacture
AssigneeInternational Business Machines Corporation
InventorsFen Chen, Jeffrey P. Gambino, Carole D. Graas, Wen Liu, Prakash Periasamy
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Abstract
Moisture detection and ingression monitoring systems and methods of manufacture are provided. The moisture detection structure includes chip edge sealing structures including at least one electrode forming a capacitor structured to detect moisture ingress within an integrated circuit. The at least one electrode and a second electrode of the capacitor is biased to ground and to a moisture detection circuit or vice versa, respectively.
Claims13
A moisture detection structure comprising a guardring structure and a crackstop structure extending vertically through an edge of the chip and at least one electrode electrically connected to either the guardring structure or the crackstop structure which forms a capacitor with a second electrode to detect moisture ingress within an integrated circuit, wherein the guardring structure and the crackstop structure comprise metal features extending vertically through multiple wiring and insulator layers along the edge of the chip.
Dependencies are inferred from the claim text.