US 10,309,903 B2Granted

ICP emission spectrophotometer

AssigneeHitachi High-Tech Science Corporation

InventorYutaka Ikku

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Abstract

An ICP emission spectrophotometer includes an inductively coupled plasma device, a spectroscope, and a computer. The spectroscope includes an incidence window, an incidence side slit, a diffraction grating, an emission window, an emission side slit, and a detector. Measurement conditions including diffraction condition and a measurement result are displayed on a display device. In a case where there are a plurality of diffraction conditions each including a combination of a diffraction grating and a diffraction order for measuring desired diffracted light, comparison information including at least an intensity and a resolution of emitted light in the diffraction condition is displayed on the display device. A measurer selects diffraction conditions in which resolution is higher from among the diffraction conditions, and selects a diffraction condition in which an intensity is obtained from among the selected diffraction conditions.

Claims8

Dependent claims

An ICP emission spectrophotometer comprising:

an inductively coupled plasma device configured to atomize or ionize an analysis target element with inductively coupled plasma to produce an atomic emission light;
a spectroscope comprising:
an incidence side slit provided on an incidence window to which the atomic emission light is incident;
a diffraction grating diffracting the incident atomic emission light;
an emission side slit provided on an emission window from which emitted light is emitted, the emitted light being diffracted light of atomic emission light diffracted by the diffraction grating;
and
a detector configured to detect the emitted light emitted from the emission side slit;
and
a display device configured to display a diffraction condition including a diffraction order for the atomic emission light in the spectroscope,
wherein the diffraction condition is given in a form in which combinations are comparable with each other, each of the combinations including a candidate diffraction grating and at least an intensity and a resolution of the emitted light for a specific diffraction order of the candidate diffraction grating.

7 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/926,097Filed 20 Mar 2018
Priority: JP 2017-05449121 Mar 2017
Published: US 2018/0275069 A127 Sep 2018
Granted: 4 Jun 2019
Term ends: Not estimatedThe source records don’t support an estimate.

Classification10 codes

G01N 21/73
Thermally excited: using plasma burners or torches
G01J 3/0235
Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows: using means for replacing an element by another, for…
G01J 3/04
Details: slit arrangements slit adjustment
G01J 3/18
Generating the spectrum; Monochromators: using diffraction elements, e.g. grating

Family

US 2018/0275069 A1Pre-grant publication · published 27 Sep 2018
US 10,309,903 B2This patent

From the US filing history. Foreign family members aren’t listed.

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