Film chamber with measuring volume for gross leak detection
AssigneeInficon GmbH
InventorsSilvio Decker, Norbert Rolff
Life of this patent
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Abstract
A film chamber for receiving a test object which is to be tested with respect to the presence of a leak, wherein the film chamber has walls enclosing a film chamber volume, said walls having at least one flexible wall region, wherein a measuring volume adjoining the flexible wall region is arranged on the side of the flexible wall region which is situated opposite the film chamber volume and is hermetically separated from the film chamber volume.
Claims12
A film chamber for receiving a test object which is to be tested for a presence of a leak, wherein the film chamber has walls enclosing a film chamber volume, said walls having at least one flexible wall portion,
- wherein a measuring volume adjoining the flexible wall portion is arranged on a side of the flexible wall portion which is situated opposite the film chamber volume and is hermetically separated from the film chamber volume, wherein the measuring volume is connected in a gas-conveying manner with a sensor adapted to monitor parameters of the measuring volume comprising pressure change within, gas flow out of, or a size of the measuring volume during evacuation of the film chamber, in order to assess a size of a possible leak in the test object based on a monitoring result.
A method for testing a test object for the presence of a leak, comprising:
- placing the test object in a film chamber,
- closing the film chamber,
- evacuating the film chamber,
- monitoring parameters of a measuring volume comprising pressure change within, gas flow out of, or a size of the measuring volume during evacuation of the film chamber, and
- assessing a size of a possible leak in the test object based on the monitoring result.
Dependencies are inferred from the claim text.