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US 10,309,833 B2Granted
Room-temperature quantum noise limited spectrometry and methods of the same
AssigneeLawrence Livermore National Security, LLC
InventorsCharles G. Stevens, Joseph W. Tringe, Christopher T. Cunningham
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Abstract
According to one embodiment, a method of forming a plasmonic condensing lens for room temperature quantum noise limited (QNL) infrared (IR) spectrometry includes: forming a silicon cone on a substrate; coating the silicon cone with a highly reflective material; and modifying the silicon cone using focused ion beam (FIB) modification to permit transmittance of light through the silicon cone.
Claims10
A method of forming a plasmonic condensing lens for room temperature quantum noise limited (QNL) infrared (IR) spectrometry, the method comprising:
- forming a silicon cone on a substrate;
- coating the silicon cone with a highly reflective material;
- and
- modifying the silicon cone using focused ion beam (FIB) modification to permit transmittance of light through the silicon cone.
1 more element
Dependencies are inferred from the claim text.