Pressure type flowmeter

Abstract

In order to solve a problem occurring in a capacitance type pressure sensor adapted to measure absolute pressure, and thereby reduce error, a pressure type flowmeter includes a fluid resistance part in a flow path through which fluid flows and measures a flow rate by detecting the upstream and downstream pressures of the fluid resistance part. Respective pressure sensors for detecting the upstream and downstream pressures are configured to be gauge pressure sensors. Each of the gauge pressure sensors is a capacitance type pressure sensor adapted to measure gauge pressure by detecting a change in the capacitance between a diaphragm displaceable by pressure and a fixed electrode and has a main body part that supports the fixed electrode and the diaphragm and forms a space between them. Further, the internal space is adapted to communicatively connect to the outside through a communicative connection part.

Dependencies are inferred from the claim text.