Profile measuring method, profile measuring apparatus, and deformation detecting apparatus

A profile measuring device, configured to measure a profile of an object-under-test, comprising:

• a light source configured to provide a light beam toward the object-under-test;
• a light-transmissive projection film configured to form an object-under-test projection on a side of the light-transmissive projection film;
• a driving unit configured in an object-under-test placing area, and configured to drive the object-under-test;
• and
• an image capturing device located at another side of the light-transmissive projection film, and configured to capture an image of the object-under-test projection to obtain a projection size of the object-under-test projection, wherein at least one measuring size of the object-under-test is obtained though calculation according to the projection size of the object-under-test projection.

A deformation detecting apparatus, comprising:

• a light-transmissive projection film;
• a light source, wherein an object-under-test placing area is located between the light source and the light-transmissive projection film, the object-under-test placing area is used to place an object-under-test, and the light source is configured to provide a light beam toward the light-transmissive projection film, to form an object-under-test projection of the object-under-test on the light-transmissive projection film;
• and
• an image capturing device, wherein the light-transmissive projection film is located between the light source and the image capturing device, and the image capturing device is configured to capture an image of the object-under-test projection, to obtain at least one size of the object-under-test projection;
• and
• an image analysis module, wherein at least one size of the object-under-test is obtained though calculation according to the size of the object-under-test projection, and the image analysis module is configured to analyze a deformation degree of the object-under-test according to the size of the object-under-test.