Method of making inkjet print heads by filling residual slotted recesses and related devices

An inkjet print head comprising:

• a semiconductor substrate having a plurality of continuous slotted recesses in a first surface, the plurality of continuous slotted recesses being arranged in parallel, spaced apart relation, and each continuous slotted recess extending continuously across the first surface, said semiconductor substrate also having a plurality of discontinuous slotted recesses in a second surface opposite the first surface and aligned and coupled in communication with the continuous slotted recesses to have a first portion defining a plurality of alternating through-wafer channels and a second portion defining residual slotted recess portions;
• a polymer material within the residual slotted recess portions;
• and
• a plurality of inkjet heaters carried by said semiconductor substrate.

An inkjet print head comprising:

• a semiconductor substrate comprising
• a first recess at a first surface, where the first recess extends continuously across the first surface,
• a second recess at a second surface opposite to the first surface, the second recess overlapping with the first recess, the first recess being connected to the second recess to form a first portion comprising a first through substrate channel and a second portion comprising a first residual recess;
• a polymer material disposed in the first residual recess;
• and
• a first inkjet heater proximate the first portion.