Inspection method

An inspection method for inspecting a suction nozzle that picks up an object using air suction, the method comprising:

• a pressure adjustment step of adjusting a pressure of air supplied from a first air source to a set pressure;
• a flow rate adjustment step of adjusting a flow rate per unit time of air that flows inside an air flow path to a set amount using air of a pressure which is adjusted in the pressure adjustment step;
• an air source exchanging step of exchanging a first air source for a second air source that has greater pressure fluctuation than the first air source after adjustment of the flow rate of air by the flow rate adjustment step is completed;
• a first measurement step of measuring a flow rate per unit time of air that flows inside the air flow path after exchanging of air sources by the air source exchanging step is completed;
• a second measurement step of measuring a flow rate per unit time of air which flows inside the air flow path in a state in which a suction nozzle which is an inspection target is connected to the air flow path;
• and
• an estimated flow rate calculation step of calculating a value, which is obtained by multiplying the flow rate per unit time measured in the second measurement step by a ratio of the flow rate per unit time measured in the first measurement step to the set amount, as an estimated flow rate.