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AssigneeBerliner Glas KGaA Herbert Kubatz GmbH & Co.
InventorsPeter Preuss, Gunnar Heinze, Michael Fall, Alexander Stein
Estimating the term…
An electrostatic holding device (100) for holding component (1) by electrostatic holding forces includes clamp carrier (10) which has electrode device (11) and is configured for receiving component (1), voltage source device (20) for provision of a source charge current for charging clamp carrier (10), source switching device (30) which is arranged for a switchable connection of voltage source device (20) with electrode device (11), and at least one charge storage device (40, 40A, 40B) which has storage capacitor (41, 41A, 41B) and is configured to receive a clamp discharge current and temporarily store electrical charges of clamp carrier (10) in storage capacitor (41, 41A, 41B) and provide a storage charge current for charging clamp carrier (10). Also described is a method for operating holding device (100) and transfer circuit (200) for transmitting charges from working capacitor (201) to storage capacitor (202).
An electrostatic holding device which is configured for holding a component by electrostatic holding forces, comprising:
A method for operating an electrostatic holding device with a clamp carrier which is configured to hold a component by electrostatic holding forces, comprising the steps:
A transfer circuit which is configured for transmitting charges from a working capacitance to a storage capacitance, comprising a transfer switch, a storage inductor, a cycle switch, a semiconductor valve and a cycle control circuit, wherein:
Dependencies are inferred from the claim text.