Device for aligning a component
AssigneeCarl Zeiss SMT GmbH
InventorMichael Erath
Life of this patent
Estimating the term…
Abstract
The disclosure provides a device for aligning a component via a guide member. A head region of the guide member is secured at a fixing point of the component, and a foot region of the guide member is secured at a fixing point of an actuating element of an actuating facility. The actuating facility is configured to hold the guide member moveably in a movement axis for the purpose of transmitting a force to the component. An adjusting facility is provided to adjust the fixing point of the actuating element so that an angle between the movement axis and the course of the guide member between the fixing points is variable.
Claims20
A device configured to align a component, the device comprising:
- a guide member;
- an actuating facility comprising an actuating element;
- and
- an adjusting facility,
- wherein:
- a head region of the guide member is secured at a fixing point of the component;
- a foot region of the guide member is secured at a fixing point of the actuating element;
- the actuating facility is configured to hold the guide member moveably in a movement axis to transmit a force to the component;
- and
- the adjusting facility is configured to adjust the fixing point of the actuating element so that an angle between the movement axis and a course of the guide member between the fixing points is variable.
Dependencies are inferred from the claim text.