Modifying design layer of integrated circuit (IC) using nested and non-nested fill objects

A computer program product comprising program code stored on a computer readable storage medium, which when executed by at least one computing device, causes the at least one computing device to modify a design layer of an integrated circuit (IC) in order to reduce processing time by performing actions including:

• identifying at least one empty region in the design layer used to form the IC;
• determining whether the at least one empty region requires a fill object;
• identifying a first area of the design layer requiring a nested fill object wherein the nested fill object is a replica of an object which it neighbors within the first area of the design layer, and a second area of the input design layer requiring a non-nested fill object in response to determining the at least one empty region requires the fill object, wherein the non-nested fill object is dissimilar in size and/or shape with a neighboring fill object;
• placing the nested fill object in the first area and the non-nested fill object in the second area;
• performing one of a simplified optical proximity correction (OPC) or no OPC on the nested fill object, and a complete OPC on the non-nested fill object and the design layer;
• and
• generating a modified design layer including a corrected version of the design layer and modified nested fill objects and non-nested fill objects after the performing of the simplified OPC or no OPC on the nested fill object and the complete OPC on the non-nested fill object and the design layer.