Copper etchant solution additives and method for producing copper etchant solution
AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorsYue Wu, Yu-lien Chou, Zhichao Zhou
Life of this patent
Estimating the term…
Loading patent…
AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorsYue Wu, Yu-lien Chou, Zhichao Zhou
Estimating the term…
The present disclosure discloses a copper etchant solution additives and a method for producing copper etchant solution. The method includes: producing copper etchant solution additives, wherein the copper etchant solution additives is an inorganic solution with cupric ions (Cu2+), and deionized water is a solvent for the copper etchant solution additives and is electric neutrality; before wet-etching, the copper etchant solution additives is added in the copper etchant solution, and the copper etchant solution is with a cupric ions (Cu2+) concentration of 700-1000 ppm. Through the above method, the present disclosure can improve etchant property of copper etchant solution to increase etching rate and uniformity.
A method for producing copper etchant solution, the production method comprising:
A copper etchant solution additives, wherein the copper etchant solution additives is an inorganic comprising cupric ions (Cu2+), deionized water is a solvent for the copper etchant solution additives and is electric neutrality, and the copper etchant solution additives is added in a copper etchant solution before wet-etching to obtain the copper etchant solution with a cupric ions (Cu2+) concentration of 700-1000 ppm, wherein the cupric ions (Cu2+) in the copper etchant solution are all electrolytic without forming complexes or depositions.
Dependencies are inferred from the claim text.