Micromechanical component and production method for a micromechanical component

A microphone having a micromechanical component, the micromechanical component comprising:

• a substrate;
• a membrane that covers an opening structured into the substrate from a first side of the substrate, and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate;
• and
• at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode is displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate;
• wherein the at least one actuator electrode is connected to the membrane at least by at least one torsion spring that is capable of being rotated about a respective torsion axis by the warping of the membrane, in such a way that the at least one actuator electrode is capable of being displaced relative to the substrate by the warping of the membrane, in each case along its axis of displacement oriented parallel to the second side of the substrate.

A pressure sensor having a micromechanical component, the micromechanical component comprising:

• a substrate;
• a membrane that covers an opening structured into the substrate from a first side of the substrate, and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate;
• and
• at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode is displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate;
• wherein the at least one actuator electrode is connected to the membrane at least by at least one torsion spring that is capable of being rotated about a respective torsion axis by the warping of the membrane, in such a way that the at least one actuator electrode is capable of being displaced relative to the substrate by the warping of the membrane, in each case along its axis of displacement oriented parallel to the second side of the substrate.