Liquid discharging apparatus, imprint apparatus, and method of manufacturing a component

An imprint apparatus, comprising:

• a head having a discharging port surface on which discharging ports are formed and configured to perform a discharging operation for discharging liquid through the discharging ports;
• a suction port configured to perform a suction operation for the discharging port surface;
• a pressure changing unit configured to change a pressure in the head;
• a control unit configured to perform the suction operation under a state in which the pressure changing unit has changed the pressure in the head in a positive pressure direction with respect to a pressure that is set during the discharging operation and the suction port is spaced away from the discharging port surface;
• and
• a patterning unit configured to form a pattern corresponding to a concavo-convex pattern of a mold on one surface of a substrate by bringing the one surface of the substrate having the liquid discharged thereto with the head and a surface of the mold having the concavo-convex pattern formed thereon into abutment against each other.

A method of manufacturing a component including a substrate through use of an imprint apparatus, the imprint apparatus including (i) a head having a discharging port surface on which discharging ports are formed and configured to perform a discharging operation for discharging liquid through the discharging ports, (ii) and a suction port, the method comprising:

• sucking the discharging port surface using the suction port under a state in which a pressure in the head is changed in a positive pressure direction with respect to a pressure that is set during the discharging operation and the suction port is spaced away from the discharging port surface;
• applying the liquid to a surface of the substrate with the head after the sucking;
• forming a pattern corresponding to a concavo-convex pattern of a mold on the surface of the substrate by bringing the surface of the substrate having the liquid applied thereto and a surface of the mold having the concavo-convex pattern formed thereon into abutment against each other;
• and
• processing the substrate having the pattern formed thereon.