3D magnetorheological polishing device and magnetorheological polishing fluid

A 3D magnetorheological polishing device, comprising:

• a container, the container being disposed with an accommodation space to accommodate a polishing fluid and a workpiece awaiting polishing;
• and
• a magnetic field generator, the container being disposed on the magnetic field generator and being configured to rotate synchronously with the magnetic field generator, wherein a rotational speed thereof ranges from 0 to 300 RPM;
• wherein the polishing fluid comprises:
• a carrier fluid, magnetic particles, abrasives, and additives;
• the carrier fluid is water-based or non-water-based and a content thereof is 28-38 wt %, a content of the magnetic particles is 50-60 wt %, a content of the abrasives is 2-12 wt %, and a content of the additives is 0.1-1 wt %.

A magnetorheological polishing fluid, comprising:

• a carrier fluid,
• magnetic particles,
• abrasives, and
• additives;
• wherein the carrier fluid is water-based or non-water-based and a content thereof is 28-38 wt %, a content of the magnetic particles is 50-60 wt %, a content of the abrasives is 2-12 wt %, and a content of the additives is 0.1-1 wt %;
• the magnetic particles are made of carbonyl iron powder with particle size of 1-10 μm and carbonyl iron-nickel alloy powder with particle size of 1-5 μm, at a ratio of 9:1;
• the abrasives are colloidal silica with particle size of 110-130 nm, and the abrasives are selected from one of mono-crystalline diamond, polycrystalline diamond, aluminum oxide, silicon carbide, iron(III) oxide, silicon oxide, and cerium(IV) oxide, or a combination thereof;
• the additives comprise a dispersant, a suspending agent, a surfactant, a lubricant, and an antioxidant.