Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder

A method of manufacturing a substrate holder for use in a lithographic apparatus, the method comprising:

• providing a main body;
• forming a plurality of burls protruding from the main body, the forming comprising:
• forming a lower body portion, protruding from the main body, of each of the burls, and
• forming, on each lower body portion, an upper body portion above the respective lower body portion,
• wherein the lower body portions are a different material than the upper body portions, the upper body portions comprise diamond-like carbon, and the upper portions are separated from each other such that they are unconnected by diamond-like carbon to each other.