Negative photosensitive composition and pattern formation method
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsHirofumi Imai, Tomoyuki Ando
Life of this patent
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Abstract
A negative photosensitive composition including an epoxy group-containing resin; and a cationic polymerization initiator containing one or more types of the following cationic polymerization initiators: a compound represented by formula (b0-1) and a compound represented by formula (b0-2), and a cationic polymerization initiator which generates an acid having a pKa of −3 or more. In the formulae, Rb01 to Rb04 are each independently a fluorine atom or an aryl group which may have a substituent, Rb05 is a fluorine atom or a fluorinated alkyl group which may have a substituent, a plurality of Rb05's may be the same as or different from each other, q is an integer of 1 or more, and Qq+'s are each independently a q-valent organic cation.
Claims4
A negative photosensitive composition comprising:
- an epoxy group-containing resin (A);
- and
- a cationic polymerization initiator (B) which comprises at least one cationic polymerization initiator (B0) selected from the group consisting of compounds represented by general formula (b0-1) and compounds represented by general formula (b0-2), and a cationic polymerization initiator (B1) which generates an acid having a pKa of −3 or more,
- wherein a ratio between the cationic polymerization initiator (B0) and the cationic polymerization initiator (B1) is 5 to 200 as a mass ratio represented by component (B0)/component (B1), and
- the cationic polymerization initiator (B1) comprises at least one compound selected from the group consisting of compounds represented by general formula (b1-1′) and compounds represented by general formula (b1-2′):
- wherein Rb01 to Rb04 are each independently a fluorine atom or an aryl group which may have a substituent, Rb05 is a fluorine atom or a fluorinated alkyl group which may have a substituent, plural Rb05's may be the same as or different from each other, q is an integer of 1 or more, and Qq+'s are each independently a q-valent organic cation;
- and
- wherein Rb11 and Rb12 each are a cyclic group which may have a substituent other than a halogen atom, a chain alkyl group which may have a substituent other than a halogen atom, or a chain alkenyl group which may have a substituent other than a halogen atom, R201 to R203 each independently represent an aryl group which may have a substituent, a heteroaryl group, an alkyl group, or an alkenyl group, and R201 to R203, may be bonded to each other to form a ring with the sulfur atom in the formula, provided that at least one of R201, R202, and R203 is an organic group having 16 or more carbon atoms.
Dependencies are inferred from the claim text.