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US 10,241,393 B2Granted
Pellicle
AssigneeShin-Etsu Chemical Co., Ltd.
InventorYuichi Hamada
Life of this patent
Estimating the term…
Abstract
There is provided a pellicle wherein each edge area where the inner wall of the pellicle frame meets the upper end face or the lower end face, respectively, of the pellicle frame consists not only of the conventional single chamfer face but also of additional attempt(s) to make the edge area virtually rounded, such as additional chamfering(s) or rounding, whereby the edge area is devoid of cracking and scars.
Claims8
A pellicle comprising a pellicle frame having an inner wall, an outer wall, an upper end face and a lower end face, and a pellicle membrane, which is adhered to said upper end face of the pellicle frame,
- wherein each edge area where the inner wall meets the upper end face or the lower end face, respectively, describes a virtual curve when viewed in cross section at least one of which comprises a primary chamfer face.
Dependencies are inferred from the claim text.