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US 10,224,164 B2Granted
Merged legs and semi-flexible anchoring having cantilevers for MEMS device
AssigneeCavendish Kinetics, Inc.
InventorsRobertus Petrus Van Kampen, Anartz Unamuno, Richard L. Knipe, Roberto Gaddi, Rashed Mahameed
Life of this patent
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Abstract
The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.
Claims9
A MEMS device, comprising:
- a first cantilever having a first end and a second end opposite the first end, the first end and the second end defining a length of the first cantilever;
- a second cantilever having a first end and a second end opposite the first end, the first end and the second end defining a length of the second cantilever;
- and
- one or more legs coupled to both the first cantilever and the second cantilever, the one or more legs also coupled to a first anchor area that is spaced from both the first cantilever and the second cantilever,
- wherein both the first cantilever and the second cantilever are disposed over a radio frequency (RF) electrode, a second electrode, and a third electrode,
- wherein the first end of the first cantilever and the first end of the second cantilever are disposed over the second electrode and the second end of the first cantilever and the second end of the second cantilever are disposed over the third electrode,
- wherein at least one of the one or more legs extend perpendicular to the RF electrode,
- wherein the one or more legs comprise a first leg and a second leg extending between the first cantilever and the second cantilever,
- wherein the first leg is parallel to and spaced from the second leg, and a third leg extending from the first leg to the first anchor area,
- wherein the first leg and the second leg are parallel to the RF electrode and the third leg is perpendicular to the RF electrode, and
- wherein a fourth leg extends perpendicular from the second leg to a second anchor area, the second anchor area being spaced from the first anchor area by a distance greater than the length of the first cantilever.
8 more elements
Dependencies are inferred from the claim text.