Semiconductor wafer position display system, semiconductor wafer position display method, and semiconductor wafer position display program

A semiconductor wafer position display method for displaying a deviation from an appropriate placement position of a semiconductor wafer mounted in a wafer mounting part having a circular interior side wall, the semiconductor wafer position display method causing a computer to perform:

• a semiconductor wafer position measurement step including measuring, by a semiconductor wafer position measurement device, the deviation from the appropriate placement position of the semiconductor wafer mounted in the wafer mounting part;
• and
• a semiconductor wafer position display control step, performed by a semiconductor wafer position display control device, including:
• a data reception step of receiving and storing measurement data obtained by the semiconductor wafer position measurement device for measuring the deviation from the appropriate placement position of the semiconductor wafer mounted in the wafer mounting part;
• and
• a screen display control step of controlling a display screen for visibly displaying the deviation from the appropriate placement position of the semiconductor wafer based on the measurement data received in the data reception step,
• a measurement data analysis step, performed by analyzing, from the measurement data, notch detection data obtained when detecting a notch of the semiconductor wafer,
• wherein the screen display control step includes a circumference display screen control step of generating display information, based on the stored measurement data, which presents the deviation from the appropriate placement position of the semiconductor wafer by displaying a circumference of the semiconductor wafer and a circumference of the circular interior side wall of the wafer mounting part and presents the deviation from the appropriate placement position of the semiconductor wafer by displaying the circumference of the semiconductor wafer based on the measurement data received by the data reception unit except the notch detection data.

A non-transitory computer-readable storage medium storing a semiconductor wafer position display program for displaying a deviation from an appropriate placement position of a semiconductor wafer mounted in a wafer mounting part having a circular interior side wall, the semiconductor wafer position display program causing a computer to execute:

• a semiconductor wafer position measurement step including measuring the deviation from the appropriate placement position of the semiconductor wafer mounted in the wafer mounting part;
• and
• a semiconductor wafer position display control function including:
• a data reception function of receiving and storing measurement data of the deviation from the appropriate placement position of the semiconductor wafer mounted in the wafer mounting part;
• and
• a screen display control function of controlling a display screen for visibly displaying the deviation from the appropriate placement position of the semiconductor wafer based on the measurement data received by the data reception function,
• a measurement data analysis step, performed by analyzing, from the measurement data, notch detection data obtained when detecting a notch of the semiconductor wafer,
• wherein the screen display control function includes a circumference display screen control function of generating display information, based on the stored measurement data, which presents the deviation from the appropriate placement position of the semiconductor wafer by displaying a circumference of the semiconductor wafer and a circumference of the circular interior side wall of the wafer mounting part and presents the deviation from the appropriate placement position of the semiconductor wafer by displaying the circumference of the semiconductor wafer based on the measurement data received by the data reception unit except the notch detection data.