Beam current measuring device and charged particle beam irradiation apparatus
AssigneeNissin Ion Equipment Co., Ltd.
InventorsHideyasu Une, Tetsuro Yamamoto, Yoshihiro Takigami
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Abstract
A beam current measuring device capable of performing measurement of a beam current distribution of a charged particle beam seamlessly and continuously in an arbitrary direction is provided. The beam current measuring device includes collector electrodes whose detection regions seamlessly continue in an arrangement direction thereof.
Claims10
A beam current measuring device for measuring a beam current distribution of a charged particle beam, comprising a plurality of collector electrodes arranged in a single row in an arrangement direction and physically separated from one another, and whose detection regions seamlessly continue in the arrangement direction thereof.
A beam current measuring device comprising:
- a plurality of collector electrodes arranged adjacent to each other and separated from each other along a line, the detection regions of the collector electrodes continuing seamlessly along the line.
Dependencies are inferred from the claim text.