Modular gas injection device
AssigneeKoolerheadz
InventorJacques Constant Stefan Kools
Life of this patent
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Abstract
Embodiments of the device relate to a modular injector (100) for injecting a gas into a processing chamber (42), comprising at least two adjacent injectors (1), each injector comprising an inlet for receiving a gas wave or a gas flow, a flow shaping section (2) having left and right sidewalls that diverge according to a divergence angle relative to a propagation axis of the gas, for expanding the gas in a direction perpendicular to the propagation axis, and an outlet for expelling the gas. The modular injector forms an equivalent large injector having an equivalent large outlet which includes the outlets of the adjacent injectors and expands the gas over the equivalent large outlet.
Claims4
A method for injecting a gas wave or a gas flow into a processing chamber, the method comprising:
- expanding the gas in a direction perpendicular to a propagation axis of the gas;
- then injecting the gas into the processing chamber using a modular injector comprising at least two adjacent injectors, each injector comprising an inlet for receiving a gas, a flow-shaping section having left and right sidewalls which diverge according to a divergence angle relative to a propagation axis of the gas, for expanding the gas in a direction perpendicular to the propagation axis, and an outlet for expelling the gas, the modular injector forming an equivalent large injector having an equivalent large outlet including the outlets of the adjacent injectors and expanding the gas over the equivalent large outlet, the modular injector comprising a connection area extending between adjacent sidewalls of the injectors;
- and
- configuring each injector so that it expels the gas in a vicinity of the connection area with a greater flow rate than near a center of its outlet, to compensate for a lack of gas expulsion in the connection area.
Dependencies are inferred from the claim text.