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US 10,220,563 B2Granted
Silicone rubber material for soft lithography
AssigneeKoninklijke Philips N.V.
InventorMarcus Antonius Verschuuren
Life of this patent
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Abstract
The present invention relates to a silicone rubber like material and a printing device including a stamp layer comprising such a material. The material is suitable for use in soft lithography as it enables stable features having dimensions in the nanometer range to be obtained on a substrate, and also allows for the accommodation onto rough and non-flat substrate surfaces. The invention also relates to methods for manufacturing the silicone rubber like material and stamp layer and use thereof in lithographic processes.
Claims5
A printing device comprising:
- a first patterned stamp layer;
- and
- a second, deformable layer, wherein
- the first patterned stamp layer having a patterned external contact surface and an internal surface in direct contact with the second layer,
- the first layer comprises a silicone rubber like material comprising at least one Q branched and/or T branched (poly)siloxane crosslinked by at least one linear polysiloxane, wherein the silicone rubber like material has a Young's modulus in a range of 7 MPa to 80 MPa, wherein the silicone rubber like material is crosslinked at a temperature below 50° C. and
- the second layer comprises a deformable material having a low Young's modulus as compared to that of the silicone rubber like material.
3 more elements
A patterned stamp layer comprising:
- a silicone rubber like material having a Young's modulus in the range of from 7 MPa to 80 MPa, the material comprising at least one functional linear polysiloxane crosslinked to at least one functional T branched and/or functional Q branched (poly)siloxane, wherein the silicone rubber like material is crosslinked at a temperature below 50° C. and wherein
- the at least one functional T branched (poly)siloxane is formed from precursors including hydride functional T branched (poly)siloxane precursors, vinyl functional T branched (poly)siloxane precursors, and mixtures thereof,
- the at least one functional Q branched (poly)siloxane is formed from precursors including hydride functional Q branched (poly)siloxane precursors, vinyl functional Q branched (poly)siloxane precursors and mixtures thereof,
- the at least one functional linear polysiloxane is selected from the group consisting of a hydride functional linear polysiloxane, a vinyl functional linear polysiloxane and mixtures thereof, and
- when the at least one functional linear polysiloxane is a mixture of vinyl functional and hydride functional linear polysiloxanes, a ratio of hydride functional linear polysiloxane to vinyl functional linear polysiloxane is in a range of from 2:10 to 8:10.
2 more elements
Dependencies are inferred from the claim text.