Method for detecting particulate radiation
AssigneeFEI Company
InventorsBart Jozef Janssen, Erik Michiel Franken, Maarten Kuijper, Lingbo Yu
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AssigneeFEI Company
InventorsBart Jozef Janssen, Erik Michiel Franken, Maarten Kuijper, Lingbo Yu
Estimating the term…
When detecting particulate radiation, such as electrons, with a pixelated detector, a cloud of electron/hole pairs is formed in the detector. Using the signal caused by this cloud of electron/hole pairs, a position of the impact is estimated. When the size of the cloud is comparable to the pixel size, or much smaller, the estimated position shows a strong bias to the center of the pixel and the corners, as well to the middle of the borders. This hinders forming an image with super-resolution. By shifting the position or by attributing the electron to several sub-pixels this bias can be countered, resulting in a more truthful representation.
A method of detecting particulate radiation using a semiconductor based pixelated detector, the detector pixels having a detector pixel size, the detector sensitive to the particulate radiation, each particle of the particulate radiation causing a multitude of electron/hole pairs in the semiconductor material of the detector, the multitude of electron/hole pairs having a centroid and a centroid extent, the extent of the centroid extent larger than the detector pixel size, the method comprising:
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