A microelectronic mechanical system (MEMS) camera module, comprising:
- a) a MEMS electrostatic piston-tube actuator comprising:
- i) a stator plate having a central stator-opening, a multiple subarrays of pistons extending outwardly and perpendicular to said stator plate, each piston having a piston-wall, said pistons surrounding said central stator-opening, wherein the pistons in each subarray of pistons being electrically connected to each other, and the pistons in each subarray of pistons being electrically insulated from the pistons in other subarrays of pistons, and wherein each subarray of pistons being electrically addressable;
- ii) a rotor plate having a central rotor-opening and an array of spaced apart through apertures or tubes surrounding said central rotor-opening fabricated in the rotor plate, wherein said apertures being vertically aligned with said pistons, and wherein each aperture having an aperture opening sized and shaped to receive and interdigitate with each piston without the piston-walls touching the walls of said each aperture during a rotation, and the walls of said apertures being electrically connected to each other,
- iii) a plurality of springs connecting said apertures to a non-moving frame, wherein during an actuation in response to electrostatic forces from a drive voltage applied between one or more subarrays of pistons and the rotor plate, the rotor plate translates along z-axis and tilts about x and y axes;
- b) a lens barrel containing at least one lens that is attached to said central rotor-opening and extending through said central stator-opening;
- c) a housing that is sized to fit and receive said MEMS electrostatic piston-tube actuator containing said lens barrel;
- d) an image sensor module that is sized to fit and receive said housing;
- e) an autofocus (AF) module to achieve AF by moving the lens barrel along the z-axis, and
- f) an optical image stabilization (OIS) module to achieve OIS by tilting the lens barrel about the x and y axes.