Systems and methods for generating and transmitting ULF/VLF signals

A method of fabricating a transmitter array for ultra-low frequency (ULF) or very-low-frequency (VLF) signals, the method comprising:

• forming a plurality of micro-electro-mechanical systems (MEMS) transmitter devices in an array, each of the MEMS transmitter devices formed by a process comprising:
• forming a first ground plane;
• forming a beam having a proximal end and a distal end, wherein the proximal end of the beam is coupled to the first ground plane by an anchor, such that the beam extends over and is spaced apart from the first ground plane;
• forming an electret on the distal end of the beam such that the electret is spaced apart from the first ground plane;
• forming an electrical bias drive on the beam that is configured to generate a stress on the beam;
• and
• forming a second ground plane spaced above the beam;
• and
• coupling a vibration drive stage to the array to synchronically drive each MEMS transmitter device such that each electret vibrates in a substantially perpendicular direction with respect to the first and second ground planes, wherein each electret is formed to vibrate at substantially the same modulated frequency to generate and transmit ULF or VLF signals.