Semiconductor switch
AssigneeKabushiki Kaisha Toshiba
InventorsYugo Kunishi, Yasuhiko Kuriyama, Yoshio Itagaki
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Abstract
A semiconductor switch includes a plurality of first terminals, a second terminal commonly provided for the plurality of first terminals, a plurality of first MIS switches provided between the plurality of the first terminals and the second terminal, respectively, configured to pass-through or cut-off a high frequency signal between the plurality of the first terminals and the second terminal, and formed on a SOI substrate, and a capacitor formed on the SOI substrate, connected between the second terminal and the plurality of the first MIS switches, and provided for the plurality of the first terminals commonly.
Claims20
A semiconductor switch comprising:
- a plurality of first terminals;
- a second terminal commonly provided for the plurality of first terminals;
- a plurality of first MIS switches provided between the plurality of the first terminals and the second terminal, respectively, configured to pass-through or cut-off a high frequency signal between the plurality of the first terminals and the second terminal, and formed on a SOI substrate, and including MIS switches directly connected to the plurality of first terminals and ground;
- and
- a capacitor formed on the SOI substrate, connected between the second terminal and the plurality of the first MIS switches, and provided for the plurality of the first terminals commonly.
Dependencies are inferred from the claim text.