Method for fabricating light-emitting element using chamber with mass spectrometer
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Satoshi Seo, Tsunenori Suzuki
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Abstract
A light-emitting element and its fabrication method are provided. The light-emitting element includes an EL layer between a pair of electrode, and the EL layer is formed by evaporation of an organic compound. The evaporation is conducted so that the partial pressure of a component with a specific molecular weight in a film-formation chamber, which is monitored by a mass spectrometer, does not exceed a specific value during the evaporation. This method allows the formation of a light-emitting element having an improved lifetime.
Claims18
A method for fabricating a semiconductor device, the method comprising the step of:
- forming a first film by evaporating a first organic compound under a first condition,
- wherein, in the first condition, each partial pressure of ethanol, hexane, dichloromethane and toluene is in a range from 1.0×10−12 Pa to 5.0×10−8 Pa.
A method for fabricating a semiconductor device, the method comprising the step of:
- forming a film comprising a first organic compound under a first condition,
- wherein, in the first condition, a ratio of a partial pressure of toluene is less than or equal to 0.1% of a total pressure of the first condition.
Dependencies are inferred from the claim text.