Light extraction using feature size and shape control in LED surface roughening

A light emitting device, comprising:

• a light emitting structure, comprising:
• a light extraction surface, comprising:
• an undoped template layer devoid of islanding growth;
• a first conductive semiconductor layer on the undoped template layer, the first conductive semiconductor layer being devoid of islanding growth and less durable to etching than the undoped template layer;
• and
• etching features extending into the undoped template layer and the first conductive semiconductor layer, wherein a topology of the etching features at the undoped template layer is sharper than a topology of the etching features at the first conductive semiconductor layer;
• an active layer on the first conductive semiconductor layer;
• a second conductive semiconductor layer on the active layer, the second conductive semiconductor layer being an opposite polarity as the first conductive semiconductor layer;
• and
• N and P-type contacts on a same surface opposite the light extraction surface.