Film formation device

A film formation device comprising:

• a mist generator that generates a mist of a raw material of a film to be formed;
• and
• a mist jet nozzle that jets the mist to a substrate on which a film is to be formed,
• the mist jet nozzle comprising:
• a main body having a hollow portion;
• a mist supply port formed in the main body and configured to supply the mist to the inside of the hollow portion;
• a first spout formed in the main body and configured to jet the mist in the hollow portion to the outside;
• a carrier gas supply port formed in the main body and configured to supply a carrier gas to the inside of the hollow portion, the carrier gas transporting the mist to the first spout;
• and
• a shower plate arranged within the hollow portion and having a plurality of holes formed therein,
• wherein
• the hollow portion comprises a first space and a second space divided by the shower plate,
• the first space is connected to the carrier gas supply port,
• the second space is connected to the first spout,
• the mist supply port is formed in the main body so as to be connected to the second space, and
• a total of opening areas of the plurality of holes formed in the shower plate is smaller than a total of an opening area of the carrier gas supply port.