Back-illuminated sensor with boron layer

An inspection system for inspecting a sample, the inspection system comprising:

• an illumination source configured to generate light;
• optics including an objective lens, the optics configured to direct and focus said light generated by the illumination source onto the sample;
• a detector configured to receive portions of the light redirected from the sample, and to output detector data based on said received portions of the light for analysis by a computing system,
• wherein the optics are further configured to collect, direct, and focus the redirected light onto the detector, and
• wherein the detector includes an array of image sensors, at least one image sensor in the array of image sensors including an image region including pixels disposed in one of a one-dimensional array and a two-dimensional array on an epitaxial silicon membrane having opposing first and second surfaces, the epitaxial silicon membrane including readout circuit elements formed on the first surface and configured to generate said detector data based on said received portions of the light, and the epitaxial silicon membrane including a pure boron layer disposed on the opposing second surface.

An inspection system comprising:

• an illumination source configured to generate light;
• optics including an objective lens, the optics configured to direct and focus said light generated by the illumination source onto one of a line-shaped region of the sample and multiple spot-type regions on the sample;
• a detector configured to receive portions of the light redirected from the sample,
• wherein the optics are further configured to collect, direct, and focus the redirected light onto the detector, and
• wherein the detector includes an image sensor formed on a semiconductor membrane including an epitaxial layer having opposing first and second surfaces, said image sensor including an image region including pixels disposed in one of a one-dimensional array and a two-dimensional array on the first surface of the epitaxial silicon membrane, and a pure boron layer disposed on the opposing second surface of the epitaxial layer.