Integrated circuit structure without gate contact and method of forming same
AssigneeGlobalfoundries Inc.
InventorsHui Zang, Manfred J Eller, Min-Hwa Chi, Jerome J. B. Ciavatti
Life of this patent
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AssigneeGlobalfoundries Inc.
InventorsHui Zang, Manfred J Eller, Min-Hwa Chi, Jerome J. B. Ciavatti
Estimating the term…
One aspect of the disclosure relates to an integrated circuit structure. The integrated circuit structure may include: a gate structure between a pair of gate spacers within a dielectric layer and substantially surrounding a fin, wherein the gate structure is disposed adjacent to a channel region within the fin; and a source/drain contact extending within the dielectric layer to a source/drain region within a fin, the source/drain contact being separated from the gate structure by at least one gate spacer in the pair of gate spacers, wherein the channel region and the source/drain region provide electrical connection between the gate structure and the source/drain contact.
An integrated circuit structure comprising:
An integrated circuit structure comprising:
An integrated circuit structure comprising:
Dependencies are inferred from the claim text.