Semiconductor devices and image sensors
AssigneeSamsung Electronics Co., Ltd.
InventorsDongmin Han, Jung-Saeng Kim, Seungjoo Nah, Junetaeg Lee
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AssigneeSamsung Electronics Co., Ltd.
InventorsDongmin Han, Jung-Saeng Kim, Seungjoo Nah, Junetaeg Lee
Estimating the term…
A device includes first patterns, second patterns, and a second sample pattern on a semiconductor substrate. The second patterns are horizontally spaced apart at an equal interval from the second sample pattern. The second sample pattern includes first and second sidewall facing each other, a first point on the first sidewall, and a second point on the second sidewall. The second sample pattern and the most adjacent first pattern in relation to the second sample pattern are spaced apart from each other at a first horizontal distance in a direction parallel to a line connecting the first point and the second point. The first horizontal distance is greater than a second horizontal distance in the direction between one second pattern of the second patterns and a most adjacent first pattern in relation to the one second pattern.
A semiconductor device, comprising:
A semiconductor device, comprising:
An image sensor, comprising:
Dependencies are inferred from the claim text.