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US 10,121,673 B2Granted
Miniaturize particulate matter detector and manufacturing method of a filter
AssigneeIndustrial Technology Research Institute
InventorsChia-Wen Chiang, Cheng-Ta Ko, I-Hsing Lin
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Abstract
In an embodiment, a miniaturize particulate matter detector includes a filter having a plurality of holes, and a concentration detector correspondingly disposed under the filter. The concentration detector has a detect area used for detecting a concentration of at least one miniaturize particulate matter. A manufacturing method of the filter is also provided.
Claims10
A miniaturized particulate matter detector, comprising:
- a filter having a plurality of holes;
- and
- a concentration detector correspondingly disposed under the filter, wherein the concentration detector has a detect area used for detecting a concentration of at least one miniaturized particulate matter,
- wherein all or part of the plurality of holes have an opening shape of gradually reducing or a gradually expanding, and the plurality of holes are through-silicon vias.
1 more element
Dependencies are inferred from the claim text.