Energy discriminating electron detector and scanning electron microscope using the same

A scanning electron microscope,

• comprising an energy discriminating electron detector as an out-lens detector,
• wherein the energy discriminating electron detector comprises:
• a main electrode disposed between an energy beam radiating device radiating an electron or ion beam through an objective lens and an object emitting electrons in response to the irradiation of the ion or electron beam, the main electrode being applied with an negative voltage;
• and
• an electron detector disposed remotely from the main electrode on the object side thereof, the electron detector detecting electrons which are those emitted from the object and reflected by the main electrode;
• wherein a reflective electrode and the energy discriminating electron detector are configured to be movable in a sample chamber or the reflective electrode and the energy discriminating electron detector are detachably attached to a sample stage on which the sample is mounted;
• and
• wherein the object is a sample to be measured.