Charged particle beam apparatus

A charged particle beam apparatus, comprising:

• a charged particle source;
• a sample table on which a sample is placed;
• a charged particle beam optical system that includes an objective lens, and focuses charged particles emitted from the charged particle source onto the sample as a charged particle beam;
• a plurality of detectors that detect secondary particles emitted from the sample;
• and
• a rotation member that magnetically, electrically, or mechanically changes a detected azimuth angle of the secondary particles in the detectors;
• wherein the rotation member is a member that electrically changes the detected azimuth angle, and is a rotation control electrode that is disposed between the objective lens and the plurality of detectors.

A charged particle beam apparatus, comprising:

• a charged particle source;
• a sample table on which a sample is placed;
• a charged particle beam optical system that focuses charged particles emitted from the charged particle source onto the sample as a charged particle beam;
• a plurality of detectors that are disposed at positions symmetrically to an optical axis of the charged particle beam, and detect secondary particles emitted from the sample when being irradiated with the charged particle beam;
• a rotation member that changes a detected azimuth angle of the secondary particles in the detectors;
• and
• a controller that is connected to a monitor to display a rotation angle of the azimuth angle of the secondary particles, and controls components of the charged particle beam apparatus;
• and
• an electrode that is disposed between the plurality of detectors to operate in an azimuth angle direction of the secondary particles.